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6.6630[J] Control of Manufacturing Processes
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(Same subject as 2.830[J])
Prereq: 2.008, 6.2600, or 6.3700
Units: 3-0-9
Lecture: TR1-2.30 (9-354)
Statistical modeling and control in manufacturing processes. Use of experimental design and response surface modeling to understand manufacturing process physics. Defect and parametric yield modeling and optimization. Forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.
D. Hardt
No textbook information availableTotal units: 12
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