MIT Subject Listing & Schedule
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3.155[J] Micro/Nano Processing Technology

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(Same subject as 6.2600[J])
Prereq: Calculus II (GIR), Chemistry (GIR), Physics II (GIR), or permission of instructor
Units: 3-4-5
Lab hours in 12-3101. W th f 9am-12pm. T th 2pm-5pm. F 1pm-4pm. Lecture: MW2.30-4 (66-144) Lab: TBA

Introduction to micro/nano fabrication technologies: wet and dry etching, chemical and physical deposition, lithography, thermal processes, and device and materials characterization. Includes laboratory sessions in the clean rooms of MIT.nano where students fabricate solar cells, and a choice of thin-film transistors, MEMS cantilevers, or microfluidic mixers. Emphasis on interrelations among material properties, processing techniques, device design, and electrical, mechanical, optical, or chemical behavior of devices. In a final project, students formulate their own device idea based on one of the four standard processes, then design, fabricate and test their devices. Homework designed to reinforce key concepts and pace students towards final project. Students engage in extensive written and oral communication exercises. Course provides background for further research work related to micro/nano fabrication. Enrollment limited.
J. Del Alamo
No textbook information available